Multiband, multi-polarization plasmonic photodetector and fabrication method

Abstract

The present disclosure presents an innovative design concept for metal interdigitated grating-based metal-semiconductor-metal Schottky plasmonic photodetectors, able to detect multiband, multi-polarization electromagnetic radiation in the ultraviolet, visible, near and mid infrared spectrum by a using a single device with two electrodes which are both positioned on the same surface of semiconductor device, being thus a genuine planar semiconducting technology. The innovative concept shows that even if the surface plasmon enhanced photosensitive devices are wavelength and polarization-selective, it is possible to detect two and more narrow bands of the electromagnetic radiation with different polarizations by using a single-device two-electrode plasmonic Schottky photodetector where both metal contacts are placed on the device surface which is receiving the radiation. The novel design concept and associated fabrication technology will be presented by means of a generic metal-semiconductor-metal device, and specific examples will be then described.